Polytec MSA-600: Micro System Analyzer

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Measuring dynamic response and topography of MEMS and microstructures

Surface topography and dynamic motion analysis and visualization are key to testing and developing microstructures such as MEMS devices (Micro-Electro-Mechanical Systems). They are indispensable for validating FE calculations, determining cross-talk effects and measuring surface deformation. The MSA-600 Micro System Analyzer is the all-in-one optical measurement workstation for characterizing surface topography as well as in-plane and out-of-plane motions.

The versions MSA-600-M/V cover frequency ranges up to 25 MHz, ideally suited for MEMS, MEMS microphones and other microsystems. The versions MSA-600-X/U cover the high and very high frequency range up to 2.5 GHz, perfect for the assessment of HF MEMS resonators, micro-acoustic devices like SAW, BAW and more.

PREMIERE:

The MSA-600-S is the specialized optical measurement workstation designed for 8 GHz real-time vibration analysis and surface topography analysis. Ideal for testing GHz MEMS like FBAR (film bulk acoustic resonators), BAW (bulk acoustic wave) filters and SAW (surface acoustic wave) devices.

Highlights

  • All-in-one optical measurement workstation for microstructures
  • Real-time response measurement (no post-processing required)
  • Versions MSA-600-M/V with up to 25 MHz
  • Versions MSA-600-X/U with up to 2.5 GHz
  • NEW MSA-600-S with up to 8 GHz
  • Unparalleled sub-pm displacement resolution
  • Fast measurement and visualization of deflection shapes
  • Straightforward and intuitive operation
  • Automated system for easy integration into probe stations
  • Import / export options for FE model validation